ELFT HÍRADÓ

[Szeminárium koordinátor <sem-admin AT wigner.hun-ren.hu>]

SZFI SeminarDerzsi ArankaHUN-REN Wigner RCP SZFIElectron power absorption 
mode transitions in low-pressure capacitively coupled plasmasTuesday, 28 
April 2026, 10:00, KFKI Campus, Bldg. 1, 2nd floor, Conference 
RoomLow-pressure capacitively coupled radio frequency discharges are widely 
used tools for plasma-based material processing, with applications ranging 
from deposition and etching in semiconductor manufacturing to surface 
treatment in biomedicine. In such systems, electron power absorption governs 
plasma generation and sustainment, determines key discharge properties, and 
plays a central role in the optimisation and control of plasma processes. In 
this presentation, electron power absorption and ionization dynamics in 
low-pressure capacitively coupled plasmas are discussed in various gases and 
gas mixtures using a combination of particle-based computational studies and 
experimental measurements. The effects of varying gas composition, pressure, 
driving frequency, and surface processes on discharge characteristics are 
analyzed, focusing on electron power absorption mechanisms and transitions 
between different discharge operation modes. Minden érdeklődőt szívesen 
látunk! - Everyone is welcome to attend.Tamás 
Pusztaisem-admin AT wigner.hun-ren.hu