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SZFI SzemináriumVass MátéMTA Wigner FK SZFIUnderstanding electron power 
absorption in radiofrequency capacitively coupled plasmas based on moments of 
the Boltzmann equation - PhD házi védés2023. június 13. kedd, 10.00, KFKI 
Telephely, I. épület 1. emeleti TanácsteremRadiofrequency capacitively 
coupled plasmas (RF-CCPs) have a wide range of industrial applications, from 
semiconductor manufacturing to plasma medicine. A thorough understanding of 
the charged particle dynamics in the plasma (consisting of electrons and 
ions), is essential for the optimization and control of these plasma 
processes. One crucial question is how electrons (which, having a relatively 
small mass, are able to follow the temporal variations of the RF-modulated 
electric field) can gain/lose energy by interacting with the electric field 
and the atoms/molecules of the (neutral) background gas. This mechanism is 
called electron power absorption. As of today, there is no single, 
self-consistent theoretical model for electron power absorption that is 
devoid of approximations and specific assumptions. In this thesis I use the 
Boltzmann Term Analysis, a computational method (based on the electron 
momentum balance equation and Particle-In-Cell/Monte-Carlo-Collisions 
(PIC/MCC) simulations), which is able to provide a self-consistent, 
spatio-temporally resolved description of electron power absorption. I show 
how this method can give a unified picture of how electron power absorption 
works in a wide range of physical situations, thus enabling a deeper 
understanding of the underlying physical phenomena that take place in 
CCPs.[1] Vass M, Wilczek S, Lafleur T, Brinkmann RP, Donkó Z & Schulze J 2020 
PSST 29(2) 025019[2] Vass M, Wilczek S, Lafleur T, Brinkmann RP, Donkó Z & 
Schulze J 2020 PSST 29(8) 085014[3] Vass M, Wilczek S, Lafleur T, Brinkmann 
RP, Donkó Z & Schulze J 2021 PSST 30(6) 065015[4] Vass M, Wilczek S, Schulze 
J & Donkó Z 2021 PSST 30(10) 105010[5] Vass M, Wilczek S, Derzsi A, Horváth 
B, Hartmann P & Donkó Z 2022 PSST 31(4) 045017  Minden érdeklődőt 
szívesen látunk! - Everyone is welcome to attend.Nagy Attilasem-admin AT szfki.hu