ELFT HÍRADÓ

[Szeminárium koordinátor <sem-admin AT szfki.hu>]

SZFI SeminarVass MátéWigner RCP SZFIHow do electrons absorb energy in radio 
frequency plasmas?Tuesday, 11 January 2022, 10:00, Bldg 1., auditorium,  
https://wigner-hu.zoom.us/j/97209260653?pwd=OWtVdVEwaXFqS2xaTmdLaUVGMjdCZz09  
 Meeting ID: 972 0926 0653  Passcode: 854105Low-pressure radio-frequency 
discharges are important tools for various industrial and biological 
applications. Understanding the underlying physical mechanisms in these 
discharges would be highly desirable in order to achieve better control and 
process optimization. One of the most important questions is how charged 
particles, especially electrons gain and lose energy (a process called 
electron power absorption) by interacting with the RF electric field and the 
particles of the background gas in the discharge. In this talk, an overview 
of the existing theoretical models for electron power absorption in 
low-pressure RF discharges is given, and a computationally assisted, 
self-consistent description of electron power absorption, based on the 
momentum balance equation for the electrons, is presented. Minden 
érdeklődőt szívesen látunk! - Everyone is welcome to attend.Róbert 
Juhászsem-admin AT szfki.hu