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[Fizinfo] Szemináriumok - Seminars: Horváth Benedek

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  • From: Szeminárium koordinátor <sem-admin AT>
  • To: SZFI Szeminárium <seminar AT>,Fizinfo <fizinfo AT>
  • Cc: Fizinfo <fizinfo AT>
  • Subject: [Fizinfo] Szemináriumok - Seminars: Horváth Benedek
  • Date: Thu, 21 Oct 2021 06:00:01 +0200 (CEST)
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SZFI SeminarHorváth BenedekWigner RCP SZFIThe role of surface processes in
low-pressure Capacitively Coupled PlasmasTuesday, 26 October 2021, 10:00,
Bldg 1., auditorium,
Capacitively Coupled Plasmas (CCPs) are common plasma sources in laboratory,
which are of interest of both academic research and technological
applications. These systems are driven by a radio-frequency voltage, which
results in a stationary state of the plasma parameters with a periodic
modulation. The Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) kinetic
simulation method is a widely applied tool for the computational study of
CCPs. While many efforts have been taken to model the gas phase processes of
CCPs precisely in PIC/MCC simulations, the surface processes are often
neglected or considered with rough simplifications in such simulations. By
using various surface models in the simulations of low-pressure CCPs operated
in electropositive and electronegative gases, a dramatic effect of using
realistic surface models on the PIC/MCC simulation results was revealed (B
Horváth et. al. 2017 Plasma Sources Sci. Technol. 26 124001; B Horváth et.
al. 2018 J. Phys. D: Appl. Phys. 51 355204). This work is presented in this
talk, as well as a computationally assisted spectroscopic technique used to
determine the ion-induced secondary electron emission coefficient of the
stainless steel electrodes in a neon CCP (B Horváth et. al. 2020 Plasma
Sources Sci. Technol. 29 055002). &nbsp;Minden érdeklődőt szívesen látunk! -
Everyone is welcome to attend.Róbert Juhászsem-admin AT

  • [Fizinfo] Szemináriumok - Seminars: Horváth Benedek, Szeminárium koordinátor, 10/21/2021

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