ELFT HÍRADÓ

[Dankházi Zoltán <danka AT ludens.elte.hu>]

Tisztelt Kollégák!

Az magyarországi látogatása keretében Martin Suchánek (TESCAN ORSAY HOLDING,
a.s) előadást tart   "Multi-dimensional Chemical Imaging Using Analytical SEM
and FIB-SEM Systems"
címmel legújabb pásztázó elektronmikroszkópos fejlesztéseikről.

Az előadás ideje és helye :
2016. február 11. 10:15, ELTE Lágymányosi kampusz, Északi Tömb 7.14 terem.

Minden érdeklődőt szeretettel várunk.

 Üdvözlettel: Dankházi Zoltán

Az előadás rövid kivonata:

Integration of various analytical techniques, such as EDX, EBSD, AFM and
recently Raman imaging has been transforming a scanning electron microscope
into a powerful analytical platform. This hyphenation gives researchers a
unique possibility of collecting multiple types of data from the identical
region of interest, thus providing comprehensive information about the
particular sample. Further combination of analytical SEM with a focused ion
beam (FIB-SEM) has further pushed the limits of material microanalysis into
third dimension. Sequential FIB slicing followed by analytical imaging has
enabled creating 3-D datasets containing elemental composition,
crystallographic information, etc. in all three dimensions. In addition, the
FIB can be also used as a primary ion source for the time of flight-secondary
ion mass spectrometry (TOF-SIMS) analysis. This technique provides 2- or 3-D
elemental, isotopic and chemical information about studied samples. The SEM
with TOF-SIMS is an important technique for targeted elemental analyses with
very high spatial resolution. In the present talk, we will discuss recent
advancements in the FEG-SEM and FIB-SEM analytical technology applied to
chemical imaging of multiple material samples. We will describe utilization of
simultaneous use of TOF-SIMS, EDX, EBSD and Raman imaging on gallium and
plasma FIB-SEM systems for material microanalysis.