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[Fizinfo] ATOMKI-szeminarium


Chronological Thread 
  • From: Zoltan Mate <mate AT moon.atomki.hu>
  • To: cseh AT nucl.sci.hokudai.ac.jp, fizinfo AT sunserv.kfki.hu, hnucsoc AT sunserv.kfki.hu, kiralyb AT tigris.unideb.hu, "KLTE-Elm.Fiz."@moon.atomki.hu, "KLTE-Kis.Fiz."@moon.atomki.hu, potornai AT tigris.unideb.hu, weil AT moon.atomki.hu
  • Subject: [Fizinfo] ATOMKI-szeminarium
  • Date: Fri Sep 19 12:04:02 2003
  • List-archive: <http://sunserv.kfki.hu/pipermail/fizinfo/>
  • List-id: ELFT HRAD <fizinfo.lists.kfki.hu>

Az MTA Atommagkutato Intezetenek nagyeloadojaban
(Debrecen, Bem ter 18/c. 12. ep. III. em.)
2003. szeptember 25-en, csutortokon 11 orakor


John H. Burnett
(NIST, Gaithersburg, Maryland, USA)

Pushing the physical limits of optical lithography


cimmel eloadast tart.
Az eloadas elott 10:30-tol tea. Vendegeket szivesen latunk.

2003. szeptember 19.
Mate Zoltan


Kivonat:

The relentless performance increase in state-of-the-art microprocessors is
due primarily to advances in optical lithography. I will discuss modern
efforts to push the physical limits of optical lithography, including our
work on the fundamental issues associated with decreasing the illumination
wavelength.

Tovabbi elozetes informacio kerheto Takacs Endretol
(etakacs AT atomki.hu)




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